High temperature furnace thermal field

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Vacuum furnace liner

The vacuum furnace liner is the core component of vacuum heat treatment equipment, usually made of molybdenum (Mo) or molybdenum alloy.
Product details

Basic Structure and Materials

1.Typical structure

Cylindrical design:diameter 300-1500mm,height 400-3000mm

Multi layer structure:usually composed of an inner liner,insulation screen,and outer cover

Flange connection:adopting special sealing design to ensure vacuum degree

2.Main materials

Pure molybdenum(99.95%),high cost-effectiveness at 1800℃,good processability,conventional vacuum heat treatment

Molybdenum lanthanum alloy(Mo La),with strong creep resistance at 2000℃and long-term high-temperature operation

TZM alloy(Mo-0.5Ti-0.1Zr),high temperature strength at 2200℃,extreme high temperature environment

Manufacturing process

Sheet metal forming process:

Molybdenum plate shearing→rounding→welding(electron beam welding)

Weld seam inspection(X-ray or ultrasonic)

Precision machining(turning,drilling)

Surface treatment technology:

Electrolytic polishing(Ra≤0.8μm)

High temperature annealing(stress relief)

Special coatings(such as SiC anti-oxidation coatings)

Application Fields

1.High end material heat treatment

Aerospace alloys(nickel based,titanium based)

Hard alloy sintering

High temperature treatment of ceramic materials

2.Semiconductor industry

Silicon wafer annealing

Preparation of compound semiconductors

Photovoltaic material processing

3.Research field

New material development

Ultra high temperature experiment

Research on Vacuum Metallurgy