Core functions and advantages

Vacuum environment: Vacuum is applied inside the furnace chamber (usually ≤ 10 ⁻ ³ Pa) to eliminate oxygen and water vapor, prevent material oxidation and decarburization, especially suitable for active metals such as titanium alloys and stainless steel.

Uniform heating: The circular structure facilitates uniform distribution of the thermal field (temperature difference can be controlled within ± 5 ℃), avoiding deformation of the workpiece.

High temperature performance: Made of high-temperature resistant materials such as molybdenum, tungsten, or graphite (up to 2200 ℃), combined with multi-layer insulation design to reduce heat loss.

Typical Structure and Materials

Main material:

Metal type: stainless steel (≤ 1000 ℃), molybdenum (1600 ℃), tantalum (2200 ℃), electrolytic polishing is required to reduce the gas release rate.

Non metallic type: high-purity graphite (treated with anti-oxidation coating), ceramic fiber (rapidly heated).

Multi layer design:

Inner liner: Directly exposed to high temperatures, made of high-purity materials.

Insulation layer: multi-layer molybdenum sheet or graphite felt, reflecting thermal radiation.

Cooling system: External water-cooled jacket (quickly cools down to below 300 ℃).

Key manufacturing processes

Welding technology: argon arc welding or electron beam welding ensures vacuum sealing, with a weld leakage rate of less than 1 × 10 ⁻¹⁰ Pa · m ³/s.

Surface treatment: Inner wall mirror polishing (Ra ≤ 0.4 μ m) reduces gas adsorption.

Supporting structure: ceramic columns or water-cooled electrodes to avoid thermal deformation and conduction.

Application scenarios

Aerospace: Hot isostatic pressing (HIP) treatment of turbine blades.

Semiconductor: Annealing process for silicon wafers (requiring metal contamination<0.1ppm).

Tool steel: Vacuum quenching of molds (hardness HRC60 or higher).