Core characteristics of tungsten heater

 ✅ Ultra high melting point: 3422 ° C, it is currently the material with the highest melting point among metals.

 ✅ High temperature stability: maintains high strength above 2000 ° C and is not easily deformed.

 ✅ Low vapor pressure: not easily volatile in a vacuum environment, suitable for high-purity processes.

 ✅ Corrosion resistance: resistant to molten metals (such as copper and aluminum) and partial acid-base corrosion.

 ✅ High resistivity: Can be used as an effective electric heating element (requires high current power supply).

Main application areas

(1) Semiconductor and Photovoltaic Industry

Monocrystalline silicon growth: CZ method (Czochralski method) heater, temperature can reach above 1600 ° C.

MOCVD equipment: used for the growth of GaN and LED epitaxial wafers.

Ion implantation machine: a heating source for high-temperature annealing process.

(2) High temperature vacuum furnace

Sintering furnace: High temperature sintering of tungsten carbide and ceramic powder (1800-3000 ° C).

Heat treatment furnace: heat treatment of special alloys such as titanium alloys and high-temperature alloys.

(3) Sapphire crystal growth

Kyropoulos: Tungsten heater provides a stable high-temperature environment.

Guided mode method (EFG): used for the production of large-sized sapphire substrates.

(4) Research and Special Industries

Electron beam evaporation coating: integrated design of tungsten crucible and heater.

Nuclear fusion experiment: high-temperature simulation testing of the first wall material.

Manufacturing process and key parameters

(1) Material selection

Pure tungsten: Excellent high-temperature performance, but high brittleness (requires doping with La ₂ O3 or K to improve ductility).

Tungsten alloys, such as W-Re (tungsten rhenium alloy), enhance thermal shock resistance.

(2) Processing technology

Powder metallurgy: tungsten powder pressing+high-temperature sintering (above 2200 ° C).

Pressure processing: Hot rolling/cold drawing into wire, strip, and rod (requiring annealing to relieve stress).

Welding: Electron beam welding (EBW) or argon arc welding (TIG) to avoid grain coarsening.

(3) Key performance parameters

Working temperature: usually 1600-3000 ° C (depending on the environment).

Resistance value: Designed according to power requirements (matching power supply voltage/current).

Lifespan: It can last for thousands of hours in a vacuum environment, and protective measures are required in an oxidizing atmosphere.